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Bayerischer Forschungsverbund für Nanoelektronik (FORNEL)




3rd FORNEL Workshop on Nanoelectronics
Erlangen, March 27, 2007


Workshop Flyer

Presentations


Presentation of FORNEL
H. Ryssel, University of Erlangen-Nuremberg and Fraunhofer IISB, Erlangen

Physics-Based Modeling of Quantum Transport in Nanostructured Devices
A. Heigl, G. Wachutka, Technical University of Munich

Simulation of CMOS Nanotransistors
A. Burenkov, Fraunhofer IISB, Erlangen

Simulation of the Silicon Tunnel FET
K. Boucart, EPFL Lausanne, Switzerland

Ab-Initio Assisted Process and Device Simulation for Nanoelectronic Devices
W. Windl, Ohio State University, USA

Memory Concepts for Sub-50nm Technology Generations
T. Mikolajick, Technical University of Freiberg

Analog Circuit Design with Multi-Gate and Tunneling FETs
M. Fulde, M. Weis, G. Knoblinger, D. Schmitt-Landsiedel, Technical University of Munich

Compact Logic Gates with Electron Y-Branch Switches
L. Worschech, D. Hartmann, A. Forchel, University of Würzburg

Scanning Force Microscopy for Process and Device Characterization
O. Krause, NanoWorld Services GmbH, Erlangen

Optimization of the Quartz Template Fabrication for UV Nanoimprint Lithography
H. Schmitt, University of Erlangen-Nuremberg

Projection Mask-Less Nano-Lithography (PML2) and Nano-Patterning (PMLP) for Nanoelectronics
H.  Loeschner, E. Platzgummer, IMS Nanofabrication AG, Vienna, Austria

A Comparative Study of ALD Grown High-k Dielectrics Using Ozone and Water as Oxidant
F. Speck, University of Erlangen-Nuremberg

In-situ Monitoring and Optimization of ALD Processes
V. Rangelov, ATV Technologie GmbH, Vaterstetten

Cleaning Methods for Silicon Surfaces
A. Aßmuth, Bundeswehr University, Munich

Quantitative Determination of Oxide Charge and Interface State Density by Photocurrent Analysis
M. Rommel, Fraunhofer IISB, Erlangen



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